Descrizione
The Spin Modules SM-600 are the optimal choice for semi-automatic coating of larger substrates. All commercial photoresists and coating materials can be coated homogeneously on wafers up to 600 mm or 16 × 16 inch substrates.
The Round-Closed Chamber Technology (RCCT) system effectively reduces air turbulence over the rotating substrate and improves coating uniformity by saturating the atmosphere with solvents faster in the closed chamber, resulting in slower drying of the photoresist and a more homogeneous coating process with remarkable savings in consumed media.
The high-precision instruments are available as mobile cabinet units.
