Sawatec Spin Module SM-150

FEATURES (BASIC CONFIGURATION)

• Up to 50 programmes with 24 segments each can be programmed
• Quick start function for repeat processes
• User-friendly process configuration with touch screen
• Process parameters: spin speed, acceleration, segment time, dosing functions
• Rotational direction can be selected (CW, CCW)
• Manual loading and unloading of the substrates
• Substrate fixation via vacuum incl. vacuum guard
• Manual cover with air flow inlet and sensor lock control
• Acoustic signal after the end of the process

ADDITIONAL FUNCTIONS (OPTIONS)

• Semi-automatic cartridge dosing system, 50 ml glass cartridge with manual dispensing arm and suck back function
• Nitrogen (N2) purge of the process chamber to prevent oxidation
• Start/stop foot switch for ease of operation (cable length
  1.8 m)
• Bowl assembly made of anodised aluminium or stainless steel
• Wafer alignment tool 1” – 12” (round)
• Bowl protection insert made of aluminium
• Vacuum pump

PERFORMANCE DATA

• Speed range: 0 to 10’000 rpm +/-1 rpm
• Speed acceleration: 0 – 10’000 rpm in 1 sec.*
• Delay: 10’000 rpm – 0 in 2,5 sec.*
• Process time up to 7‘200 seconds