SAWATEC Hotplate HP-300

FEATURES (BASIC CONFIGURATION)

  • Temperature control with digital target and actual value display
  • User-friendly process configuration with touch screen
  • Quick start/stop function for repeat processes
  • Automatic temperature limit switch, no overheating
  • Heating ramp up possible with 24 program steps
  • Proximity as well as loading pins, can be easily adapted to different substrate sizes
  • Hot-plate with protection glass, easy cleaning
  • Easy levelling of the hot-plate, prevents discharge of photoresist
  • Manual substrate fixation via vacuum
  • Manual loading and unloading of the substrates

 

ADDITIONAL FUNCTIONS (OPTIONS)

  • N2 flushing program controlled, no oxidation
  • HMDS priming program controlled, optimized adhesion
  • Setup tool for optimal height adjustment of the pins and leveling of the Hotplate

PERFORMANCE DATA

  • Temperature range: ambient temperature up to 250 °C
  • Temperature accuracy: +/- 0.8 °C at 100 °C
  • Electrical driven proximity and loading pins (stroke 8 mm)
  • Program controlled adjustable proximity pins (0.1 mm increments)
  • Pin-circle-diameters: 45 – 292 mm (2 – 12″)

 

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Descrizione

Brochure

High precision soft and hard baking

The Hotplate HP-300 was developed for precise soft bake and hard bake processes in lithography, in MEMS and similar applications. It can be used for substrates with a diameter of up to 300 mm and thickness of 14 mm at maximum (proximity/loading pins in the upper start position). The temperature range is designed for up to 250 °C by default. The set temperature and the temperature profile have narrow margins, meaning that a high coating quality can be achieved.

The high-precision instruments are available as mobile cabinet and bench-mounted unit.

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    Prodotti correlati

    • SAWATEC Hotplate HP-200

    • SAWATEC Hotplate HP-200-Z

    • SAWATEC Hotplate HP-150

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    Puoi scrivere una richiesta compilando i campi di seguito. Un nostro esperto sarà felice di rispondere a qualsiasi tua domanda.
    (+39) 081 661 003